Indium Tin Oxide Target


Product ITO Target
Main Content (wt%)* In2O3:SnO2=90:10
Purity (%) 99,995
Relative Density (%) 99,8
Theoretical Density (g/cm3) 7.156
Volume Resistivity (Ω·cm) 1.33×10-4
Bending Strength (Mpa) ≥190Mpa
Planar Target Size (mm) * max. 1150x350x6
Rotatable Target Size (mm) * Length: 450
Innerer Durchmesser: 135
Außerer Durchmesser: 153
Impurities(≤ ppm) Si 10,2
Fe 2,5
Mg 1,4
Ca 4,2
Na 1,5
Al 4,2
Cu 2,1
Cd <0.5
Pb <0.5
Zn <0.5
Sr <0.5
Ag <0.5
*: More deminsions available, also for your special requirements.


Fracture by electron micrograph


Ultrasonic Inspection Chart


Bonding Rate>98%


The Full Band Transmittance at Different Resistivity Films